Optical Lens Anti Reflective Coating Machine With High Thermal Efficiency

ATOP Electron Beam Gun Vacuum Coating Optical Lens Coating Machine

Electron beam evaporation is that the membrane is put into the water-cooled copper crucible, heated by

direct use of electron beam, the vaporized atoms or molecules of membrane material is condensed to a

mould by incidence to the surface of the substrate after escaping from the surface evaporation. Electron

beam evaporation has high thermal efficiency, beam density, evaporation speed, high purity of film made

than the resistance heating evaporation.

The machine is consist of vacuum chamber, Work piece carrier,vacuum pumping system, bias power

supply, coating system, gas system, heating system,working system,control system,alarm system and

electron gun,evaporation source.

1.The traditional vertical or efficient horizontal,equipped with large crucible gun,the film surface is smooth

and uniformity;

2.Equipped with high-power ion source,improve the coating quality and efficiency;

3.Equipped quartz crystal film thickness control device,can realize the film forming rate and automatic

process control;

4.The design of structure can meet the demands of vacuum technology,vacuum system adopt free-oil

system to ensure the whole system work under no oil condition,ensure film clean;

5.The vacuum interlock protection of operating system,vacuum pump with water,power outage alarm

function;

6.Touch screen and PLC control,realize the parametric settings,real-time monitoring and intelligent fault

diagnosis.