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Product Details:
Payment & Shipping Terms:
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| Business Type: | Manufacturer | Chamber Material: | SUS304 |
|---|---|---|---|
| Condition: | New | Control System: | Manual Automatic All-in-One |
| Voltage: | 380V | Customization: | Yes |
Application Field
Mainly suitable for liquid crystal displays, plasma displays, electroluminescent display, touch screen, solar
cells, flexible circuit boards and other conductive glass and electronic instrument high transparent
conductive films.A semiconductor membrane with high conductivity, visible transmittance, mechanical
hardness and good stability.By using different structure targets and different target materials, a layer or
layer of nano-coating is deposited on the substrate surface to form a high and low resistance ITO film.
Main features
1. Traditional horizontal or high-efficient vertical design, multi-vacuum chamber and sputtering chamber
structure, vacuum lock isolation between vacuum chamber, can be selected and meet different needs;
2. Adopt a new type of flat target, columnar target, rectangular target, twin magnetic control to target
sputtering technology, and improve the effect and efficiency of the coating.
3. Equipped with high precision magnetic control power supply, gas flow, speed control, high degree
automation, simple operation;
4. The workpiece rotating frame adopts the roller structure, which can adjust the running speed and the
product uniformity.
5. Rapid deposition rate and small temperature rise can inhibit the phenomenon of fire and target
poisoning.
Product Name | |
Vacuum Chamber Size | Decide according to the substrate size and output |
Substrate | |
Coating Film | High transparent conductive films |
Coating Colors | Gold, rose gold,coffee,brown,bronze,blue,rainbow etc. |
| Applications | Mainly suitable for liquid crystal displays, plasma displays, electroluminescent |
Structure | Vertical type ; horizontal type ; single door type ; double-door type. |
| Features | The rolling system adopts high precision servo frequency conversation to control the |
| Configuration | High pumping speed, high efficiency, energy saving, full automatic process controller can be simple, reliable, beautiful. |
| Weight | 3Tons-8Tons accordingly |
Basic configuration
1. Coating room: vertical single room, multi-room or horizontal single, multi-chamber structure selection,
304 stainless steel material, the effective diameter of the vacuum chamber is 800mm- 3500mm, with water
cooling structure, etc.
2. Vacuum system: mechanical pump, rotary vane pump, roots pump, molecular pump, low temperature
pump, high vacuum oil diffusion pump with cold well, high vacuum oil diffusion pump, adopt stainless steel
pipe and valve;
3. Coating system: 2 sets of 2-10 sets of flat target or column target, DC magnetron sputtering, DC+RF
magnetron sputtering, HDAP coating.
4. Inflating system: 1-4 gas flow meter and flow indicator control;
5. Control system: touch screen, PLC, automatic and manual control can be converted at any time.Real-
time display detailed parameters, fully automatic control of the entire production process, automatic
storage process parameters.The main electrical components are famous brands such as schneider.
6. Safety system: setting up the sound and light alarm device of water, electricity and gas anomaly, and
implementing corresponding protection procedures;
7. Auxiliary pumping: a quick circulating low temperature water vapor trap;
8. Heating system: the temperature of the base plate can reach 350 degrees with the tube and other
heating elements;
9. Can be equipped with multiple target sources according to customer requirements;
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